| HOME > Product Information > Microchamber > The type micro chamber corresponding to ultrahigh-vacuum & ultra low oxygen |
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| Analysis system |
| A scientific-experiments device design and manufacture |
Automatic control and
counting system |
| Microchamber |
| >>The type micro chamber corresponding to a high temperature & ultrahigh vacuum |
| >>The type micro chamber corresponding to ultrahiggh |
| >>Infrared heat & oxygen-partial- pressure control micro chamber |
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| Product outline |
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They are an ultrahigh vacuum and a micro chamber made from stainless steel corresponding to ultra low oxygen environment. 4 sets of measurement probes can be positioned with high precision by 3 axis(X,Y,Z) stage, and incorporate a Peltier devuce and a micro heater, and heating cooling of a sample is possible for them.
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| Feature and Function |
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・It is a type micro chamber corresponding to the ultrahigh vacuum（１ｘ１０Ｅ-６Ｐａ）of "leak zero."
・Play an active part in various devices or sensor development.
・In combination with a PID type oxygen-partial-pressure controller(product made from STLab), an experiment in the ultra low oxygen １-１０Ｅ-30ａｔｍＯ2 atmosphere is also possible.
・Positioning of a measurement probe is possible with high precision by 3 axis stage(x,Y,Z).
・Heating cooling of a sample is possible.
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| Specifications and Performance |
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| Sample stand temperature |
max800℃（500℃） |
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| Heater |
200W thermocoax heater |
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| Thermoregulator |
Program thermoregulator
(19patterns/19steps) |
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| Attainment vacuum in a chamber |
Level of 10E-6 Pa(at however,the time of TMP direct connection) |
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| Leak rate |
Below 1×10E-10Paand, cube meter/sec |
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| Exhaust |
35with dry cleaning pump L/sec turbo molecular drag pump |
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| Measurement probe |
Tungsten（20micro of tips mR, 4 sets） |
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| Probe migration length |
±12mm of X-axis, ±7mm of Y-axes、±7mm of Z-axes |
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