| HOME > Product Information > Microchamber > Infrared heat & oxygen-partial-pressure control micro chamber |
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| Analysis system |
| A scientific-experiments device design and manufacture |
Automatic control and
counting system |
| Microchamber |
| >>The type micro chamber corresponding to a high temperature & ultrahigh vacuum |
| >>The type micro chamber corresponding to ultrahigh-vacuum & ultra low oxygen |
| >>Infrared heat & oxygen-partial- pressure control micro chamber |
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| Product outline |
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This equipment consists of four pairs of measurement microprobes, a micro chamber of type corresponding to the high vacuum which has an infrared oven of two upper and lower sides, and a PID type cyclical form oxygen-partial-pressure controller, It is a system in which a maximum of 1200℃ of rapid heating is possible in oxygen partial pressure about 1-10E-30atm and the sample temperature of 1 inch.
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| Specifications and Performance |
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| 【Infrared micro chamber】 |
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| Chamber size |
phi152mm×80mm（internal phi100×50ml） |
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| Sample size |
maxphi25.4×t2mm |
| Sample holder |
Product made from ＳｉＣ |
| Window of source container |
Silica glass （two upper and lower sides,、phi100×t6mm） |
| Attainment vacuum |
１０Ｅ－６Ｐａ |
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| Microprobe |
Platinum plating tungsten （tip 50micronR） |
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| Prove move method |
３ axis（X,Y,Z）stage |
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| Infrared oven |
Condensing heating system （2kW/set） |
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| Condensing size |
phi30mm（focal length of 80mm） |
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| Highest temperature |
Not less than １２００℃ |
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| Outside dimension |
W364×H700×D364 |
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| 【ＰＩＤ type oxygen-partial-pressure controller】 |
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| Oxygen-partial-pressure control device |
１-１０Ｅ-３０atm／ＣＢ type |
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| Processing gas kind |
Inactive gas （N2, Ar, He, etc.） |
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| Processing gas mass flow |
２００ＳＣＣＭ |
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| Oxygen-partial-pressure control system |
Zirconia type oxygen pump |
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| Oxygen-partial-pressure setup |
Digital type |
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| External monitor control and software |
Pre-attachment |
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| Monitor item |
Oxygen partial pressure, line pressure |
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| Control item |
Oxygen partial pressure, external channel change |
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| Outside dimension |
W220×H378×D570 |
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