| HOME > Product Information > Microchamber > The type micro chamber corresponding to a high temperature & ultrahigh vacuum |
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| Analysis system |
| A scientific-experiments device design and manufacture |
Automatic control and
counting system |
| Microchamber |
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>>The type micro chamber corresponding to a high temperature & ultrahigh vacuum |
| >>The type micro chamber corresponding to ultrahigh-vacuum & ultra low oxygen |
| >>Infrared heat & oxygen-partial- pressure control micro chamber |
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| Product outline |
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They are high temperature, an ultrahigh vacuum, and a micro chamber made from stainless steel corresponding to ultra low oxygen environment. 4 sets of measurement probes can be positioned with high precision by 3 axis (X,Y,Z) stage, and a maximum of 800℃ heating is possible for them by a heating sample stand with a built-in thermocoax heater. furthermore, attainment vacuum 1x10E-6Pa high vacuum atmosphere is acquired by an attached turbo molecular drag pump.
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| Feature and Function |
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・It is a type micro chamber corresponding to the ultrahigh vacuum(1x10E-6Pa)of "leak zero."
・A maximum of 800℃ high temperature heating is possible.
・An experiment in the ultra low oxygen 1-10E-30atmO2 atmosphere is also possible in combination with a PID type oxygen-partial-pressure controller(product made from STlab).
・Positioning of a measurement probe is possible with high precision by 3 axis stage(X,Y,Z).
・Thyristors control type heater heating power supply is attached.
・An external temperature control program is attached.
・A turbo molecular drag pump with a try pump is attached.
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| Specifications and Performance |
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| Sample stand temperature |
max800℃（500℃） |
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| Heater |
200W thermocoax heater |
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| Thermoregulator |
Program thermoregulator
(19 patterns/19 steps) |
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| Attainment vacuum in a chamber |
Level of 10E-6 Pa(at however,the time of TMP direct connection) |
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| Leak rate |
Below 1×10E-10Pa and cube meter/sec |
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| Exhaust |
35with dry cleaning pump L /sec turbo molecular drag pump |
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| Measurement probe |
Tungsten（20micro of tips mR, 4 sets） |
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| Probe migration length |
±12mm of X-axis, ±7mm of Y-axes, ±7mm of Z-axes |
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| Current introduction terminal |
A maximum of-16.5A(1 set) |
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| Thermo couple |
K type（1set） |
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| Size |
W350×D315×H120 |
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| Weight |
about 12kg |
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