This device adds hydrogen (H2) and vapor (H2O) of arbitrary concentration to examination atmosphere gas (Ar etc.), adjusts oxygen partial pressure with a balanced reaction, and measures it with a zirconia type oxygen sensor. With this device, oxygen-partial-pressure adjustment of quick examination admosphere gas is possible, and it can measure to ultra low oxygen concentration (1-10E-30atm02) with an attached oxygen sensor (SiOC-200C).

　・It is ultra low oxygen environment (to 10E-30atmO2) adjustment equipment by H2 / O2 balance gas.
　・Ultra low oxygen environment can be offered quickly.
　・Oxygen partial pressure can be monitored with an attached high sensitivity oxygen sensor.

　The Oxygen partial pressure in examination atmosphere gas (argon, nitrogen, etc.) become settled by the following formula / hydrogen concentration and vapor concentration, and the thermodynamic equilibrium constant Kp at the temperature. This oxygen partial pressure can be checked with an attached quantity sensitivity oxygen sensor.

(Example)
The oxygen partial pressure in the atmosphere gas containing 4vo1H2 and 2000ppmH2O is set to 8.9X10E-25atmO2 at the time of the temperature of 700℃ (Kp=2.65X10E10)